JPH0628272Y2 - インクジェットヘッド基板の構造 - Google Patents
インクジェットヘッド基板の構造Info
- Publication number
- JPH0628272Y2 JPH0628272Y2 JP1987167708U JP16770887U JPH0628272Y2 JP H0628272 Y2 JPH0628272 Y2 JP H0628272Y2 JP 1987167708 U JP1987167708 U JP 1987167708U JP 16770887 U JP16770887 U JP 16770887U JP H0628272 Y2 JPH0628272 Y2 JP H0628272Y2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- layer
- common electrode
- inkjet head
- heat generating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 title claims description 46
- 229910052751 metal Inorganic materials 0.000 claims description 14
- 239000002184 metal Substances 0.000 claims description 14
- 239000004020 conductor Substances 0.000 claims description 9
- 238000010438 heat treatment Methods 0.000 claims description 8
- 239000010410 layer Substances 0.000 description 40
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 8
- 239000011521 glass Substances 0.000 description 8
- 238000007639 printing Methods 0.000 description 4
- 230000017525 heat dissipation Effects 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000005192 partition Methods 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 238000005338 heat storage Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 230000000191 radiation effect Effects 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Landscapes
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987167708U JPH0628272Y2 (ja) | 1987-10-30 | 1987-10-30 | インクジェットヘッド基板の構造 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987167708U JPH0628272Y2 (ja) | 1987-10-30 | 1987-10-30 | インクジェットヘッド基板の構造 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0170541U JPH0170541U (en]) | 1989-05-11 |
| JPH0628272Y2 true JPH0628272Y2 (ja) | 1994-08-03 |
Family
ID=31456245
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987167708U Expired - Lifetime JPH0628272Y2 (ja) | 1987-10-30 | 1987-10-30 | インクジェットヘッド基板の構造 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0628272Y2 (en]) |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55132252A (en) * | 1979-04-02 | 1980-10-14 | Canon Inc | Recording head |
| JPS59111858A (ja) * | 1982-12-17 | 1984-06-28 | Canon Inc | 液体噴射記録装置 |
| JPS6042069A (ja) * | 1983-08-19 | 1985-03-06 | Rohm Co Ltd | サ−マルプリントヘツド |
-
1987
- 1987-10-30 JP JP1987167708U patent/JPH0628272Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0170541U (en]) | 1989-05-11 |
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